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Volume 9(4); Aug 2006
Review
최근의 DRAM capacitor 개발 동향
Seong-Geun Kim, Cheol-Seong Hwang
Ceramist.
2006;9(4):7-14.
Published online August 31, 2006
PDF
실리콘 산화물 박막의 원자층 증착 기술
Won-Jun Lee
Ceramist.
2006;9(4):15-22.
Published online August 31, 2006
PDF
산화물 원자층 증착의 나노기술에의 응용
Wan-Ju Maeng, Hyeong-Jun Kim
Ceramist.
2006;9(4):23-31.
Published online August 31, 2006
PDF
리모트 플라즈마 원자층 증착 기술
Hyeong-Tak Jeon
Ceramist.
2006;9(4):32-37.
Published online August 31, 2006
PDF
플라즈마 원자층박막증착 기술과 유전 박막에의 응용
Seung-Hun Jeong
Ceramist.
2006;9(4):38-44.
Published online August 31, 2006
PDF
배치식 종형 ALD장치의 현황 및 전망
Yong-Won Kim
Ceramist.
2006;9(4):45-51.
Published online August 31, 2006
PDF
Gate 절연막을 위한 고유전 박막 개발
Man-Ho Cho
Ceramist.
2006;9(4):52-57.
Published online August 31, 2006
PDF
Review of alternative gate stack technology research during the last decade
Byoung-Hun Lee, Paul Kirsch, Husam Alshareef, Prashant Majhi, Rino Choi, Seung-Chul Song, Hsing Huang Tseng, Raj Jammy
Ceramist.
2006;9(4):58-71.
Published online August 31, 2006
PDF
ABOUT
Aims and scope
About the journal
Editorial board
Open access
Contact us
BROWSE ARTICLES
All issues
Current issue
Ahead-of print
Most view
Most download
Most cited
Funded articles
Search
Author index
EDITORIAL POLICY
Research and publication ethics
AUTHOR INFORMATION
Instructions for authors
Author’s checklist
E-submission
Copyright transfer agreement