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Volume 9(4); Aug 2006
Review
최근의 DRAM capacitor 개발 동향
Seong-Geun Kim, Cheol-Seong Hwang
Ceramist. 2006;9(4):7-14.   Published online August 31, 2006
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실리콘 산화물 박막의 원자층 증착 기술
Won-Jun Lee
Ceramist. 2006;9(4):15-22.   Published online August 31, 2006
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산화물 원자층 증착의 나노기술에의 응용
Wan-Ju Maeng, Hyeong-Jun Kim
Ceramist. 2006;9(4):23-31.   Published online August 31, 2006
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리모트 플라즈마 원자층 증착 기술
Hyeong-Tak Jeon
Ceramist. 2006;9(4):32-37.   Published online August 31, 2006
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플라즈마 원자층박막증착 기술과 유전 박막에의 응용
Seung-Hun Jeong
Ceramist. 2006;9(4):38-44.   Published online August 31, 2006
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배치식 종형 ALD장치의 현황 및 전망
Yong-Won Kim
Ceramist. 2006;9(4):45-51.   Published online August 31, 2006
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Gate 절연막을 위한 고유전 박막 개발
Man-Ho Cho
Ceramist. 2006;9(4):52-57.   Published online August 31, 2006
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Review of alternative gate stack technology research during the last decade
Byoung-Hun Lee, Paul Kirsch, Husam Alshareef, Prashant Majhi, Rino Choi, Seung-Chul Song, Hsing Huang Tseng, Raj Jammy
Ceramist. 2006;9(4):58-71.   Published online August 31, 2006
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