| Nanoscale Analysis of Functional Thin Films and Energy Materials Using Scanning Probe Microscopy |
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Jaegyu Kim1,2 |
1Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
2Rice Advanced Materials Institute, Rice University, Houston, TX 77005, USA |
| 주사 탐침 현미경 기술을 이용한 기능성 박막 및 에너지 소재의 나노스케일 분석 |
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김재규1,2 |
1캘리포니아 대학교 버클리 재료공학부
2라이스 대학교 첨단재료연구소 |
Correspondence:
Jaegyu Kim,
Email: kimjaegyu@berkeley.edu
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Received: 5 May 2025 • Accepted: 27 May 2025 |
| Abstract |
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Scanning probe microscopy (SPM) has emerged as a versatile and powerful tool for nanoscale characterization of functional thin films and energy materials. Beyond topographical imaging via atomic force microscopy (AFM), SPM enables high-resolution mapping of electrical, mechanical, ionic, and magnetic properties, facilitating comprehensive understanding of diverse material systems. This review introduces key SPM techniques―such as lateral force microscopy (LFM), piezoresponse force microscopy (PFM), conductive AFM, electrochemical strain microscopy, and Kelvin probe force microscopy―and highlights their applicability to dielectric thin films, ferroelectric systems, battery composites, and ionic conductors. Advanced multidimensional techniques such as general mode (G-mode) SPM, dual-frequency PFM, and band excitation approaches are also discussed, offering enhanced signal sensitivity and data fidelity. Moreover, emerging developments in tomography SPM, photothermal AFM-based infrared spectroscopy (AFM-IR), and machine learning-based SPM are presented as future directions. This paper provides a comprehensive overview of the contributions of SPM to the precise analysis of structure–property relationships in functional thin films and energy materials at the nanoscale. |
| Key Words:
Electromechanics, Energy materials, Nanoscale characterization, Scanning probe microscopy, Surface science |
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