| Principles and Applications of SEM and EBSD for Microstructural Characterisation |
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Minsoo Jin, Pyuck-Pa Choi |
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Nanostructured Materials & Advanced Characterisation Laboratory, Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST) |
| 주사전자현미경(SEM)과 전자후방산란회절(EBSD)의 구조, 원리, 그리고 미세조직 분석 활용 |
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진민수, 최벽파 |
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한국과학기술원 신소재공학과 나노구조재료 및 첨단분석 연구실 |
Correspondence:
Minsoo Jin,
Email: jmins94@kaist.ac.kr
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Received: 8 May 2025 • Accepted: 27 May 2025 |
| Abstract |
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This paper provides an overview of Scanning electron microscopy (SEM) and Electron backscatter diffraction (EBSD). SEM is an imaging technique that uses a focused electron beam to analyse the surface morphology, chemical composition, and crystallographic characteristics of materials in high resolution. EBSD analyses Kikuchi patterns and enables the extraction of detailed information such as crystallographic orientation, grain boundaries, texture, and local deformation. This work will deliver both theoretical principles and practical applications of SEM and EBSD technologies. |
| Key Words:
Electron backscatter diffraction (EBSD), Microstructure chracterisation, Scanning electron microscopy (SEM) |
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