| A Comprehensive Review on the Technological Evolution and Perspective of Atom Probe Tomography |
|
Boryung Yoo1, Se-Ho Kim2 |
1Semiconductor R&D Center, Samsung Electronics Co., Ltd. 1 Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do 18448, Republic of Korea
2Department of Materials Science and Engineering, Korea University, 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea |
| 원자 탐침 현미경의 기술 발전과 전망 |
|
유보령1, 김세호2 |
1삼성전자 반도체연구소
2고려대학교 신소재공학부 |
Correspondence:
Se-Ho Kim,
Email: sehonetkr@korea.ac.kr
|
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Received: 13 May 2025 • Accepted: 27 May 2025 |
| Abstract |
|
Atom probe tomography (APT) has emerged as a powerful analytical technique capable of reconstructing three-dimensional compositional and structural information at the atomic scale. This paper provides a comprehensive review of the historical development of APT, structured around four key stages: Field emission microscopy, Field Ion Microscopy, Field Desorption Microscopy, and the eventual advent of APT. Foundational work by Erwin Müller laid the groundwork for APT through innovations in electron and ion imaging. The subsequent integration of mass spectrometry and position-sensitive detectors enabled true 3D atomic-scale analysis. We also discuss critical sample preparation methods along with measurement techniques. Furthermore, the paper covers advanced reconstruction algorithms and highlights recent advances in APT instrumentation such as the LEAP 6000 system. This review aims to provide a thorough and practical reference for researchers seeking to understand and apply APT in materials science and related fields. |
| Key Words:
3D reconstruction, Atom Probe Tomography, Field Evaporation, Specimen Preparation, Time-of-Flight Mass Spectrometry |
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