| Tuning the Conductivity of IGZO Thin Films for Enhanced Sensitivity in Electrolyte-Gated Biosensors |
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Young-Geun Ha |
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Department of Chemistry, Kyonggi University, Suwon, Gyeonggi-Do 16227, Republic of Korea |
| 전해질 게이트 바이오센서의 감도 향상을 위한 IGZO 전도도 제어 전략 |
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하영근 |
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경기대학교 화학과 |
Correspondence:
Young-Geun Ha,
Email: ygha@kgu.ac.kr
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Received: 29 April 2025 • Revised: 27 May 2025 • Accepted: 11 June 2025 |
| Abstract |
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Indium-gallium-zinc oxide (IGZO) semiconductors have gained significant attention for biosensing applications due to their excellent electrical properties, chemical stability, and solution-processability. However, their inherently high conductivity can limit biosensor sensitivity by suppressing current responses to subtle surface charge variations. This study presents a systematic strategy to enhance biosensor sensitivity by tuning the electrical conductivity of IGZO thin films through precursor composition adjustment and annealing temperature control. Electrolyte-gated transistors fabricated with conductivity-optimized IGZO channels exhibited amplified electrical responses to biological interactions, resulting in significantly improved detection sensitivity compared to conventional high-conductivity devices. A glucose sensing experiment further demonstrated that lower conductivity IGZO films led to a fourfold enhancement in sensitivity without requiring complex structural modifications. These findings highlight conductivity engineering as a practical and effective approach to optimize IGZO-based biosensors, paving the way for highly sensitive detection platforms suitable for next-generation flexible and wearable biosensing applications. |
| Key Words:
Biosensor, IGZO, Sensitivity, Transistor |
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