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Ceramist 2001;4(1):67-74.
Published online February 28, 2001.
Seung-Gon Park, Do-Hyeong Kim
반도체 배선을 위한 구리 증착 기술의 개발 현황
박승곤, 김도형
전남대학교 공과대학 응용화학부
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