Review

Ceramist 2009;12(1):18-25.
Published online February 28, 2009.

¹
²KAIST

반도체 산업용 AIN 소재 개발

이성민¹, 김도경²

¹요업(세라믹)기술원 엔지니어링세라믹본부
²한국과학기술원 신소재공학부

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