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Review
반도체용 세라믹 히터의 산업 및 기술 동향
Deok-Won An, Myeong-Ha Park
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Review
Ceramist 2017;20(4):6-14.
Published online December 31, 2017.
Deok-Won An
,
Myeong-Ha Park
반도체용 세라믹 히터의 산업 및 기술 동향
안덕원, 박명하
(주)미코, 기술연구소
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