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반도체 제조공정용 탄화규소 부품/소재 기술
Sang-Hwan Park, Dong-Yun Lee, Jae-Ho Han, Seong-Ho Yun, Gyeong-Seon Jo
Ceramist.
2007;10(4):38-53.
Published online August 31, 2007
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ABOUT
Aims and scope
About the journal
Editorial board
Open access
Contact us
BROWSE ARTICLES
All issues
Current issue
Ahead-of print
Most view
Most download
Most cited
Funded articles
Search
Author index
EDITORIAL POLICY
Research and publication ethics
AUTHOR INFORMATION
Instructions for authors
Author’s checklist
E-submission
Copyright transfer agreement