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Review
반도체 제조공정용 탄화규소 부품/소재 기술
Sang-Hwan Park, Dong-Yun Lee, Jae-Ho Han, Seong-Ho Yun, Gyeong-Seon Jo
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Review
Ceramist 2007;10(4):38-53.
Published online August 31, 2007.
Sang-Hwan Park
,
Dong-Yun Lee
,
Jae-Ho Han
,
Seong-Ho Yun
,
Gyeong-Seon Jo
반도체 제조공정용 탄화규소 부품/소재 기술
박상환, 이동윤, 한재호, 윤성호, 조경선
한국과학기술연구원 재료기술연구본부
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